Ion gauge capable of measuring medium and high vacuum
The IGE 3000 is an electronic gauge using an ionization tube.
0.01 Torr to 10^(-10) Torr(1.333224 to 1.3332e-8 Pa)
Ultra-high vacuum measurement is possible.
Turbopumps, ion pumps, cryopumps, etc.
For maintaining the vacuum processwhen working in an ultra-high vacuum environment
We will provide you with the measurements you need.
Applications and Industries
Chemical Vapor Deposition